采用化学水浴法,以ZnSO4、柠檬酸钠、NH3·H2O、SC(NH2)2为反应物,在玻璃衬底上制备了ZnS薄膜,采用XRD、SEM、分光光度计、台阶仪等手段研究了水浴温度、沉积时间、pH值等条件对ZnS薄膜的晶体结构、表面形貌、光学性能的影响.结果表明,ZnS薄膜经退火后出现明显特征衍射峰,为闪锌矿结构,可见光范围内平均透过率均大于80％.经过工艺优化,在水浴温度为80℃、沉积时间为1h、pH=10条件下沉积的ZnS薄膜表面均匀致密,可见光范围内平均透过率为89.6％,光学带隙为3.82 eV,适合做铜铟镓硒和铜锌锡硫薄膜太阳电池的缓冲层.
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