研究了CeO2-MgO(CeM),Dy2O3-MgO(DyM),Yb2O3-MgO(YbM)及Y2O3-MgO(YM)体系烧结助剂对氮化硅陶瓷的热导率及电学性能的影响.结果表明:与YM烧结助剂相比,添加DyM烧结助剂的氮化硅陶瓷热导率较低;添加CeM烧结助剂的氮化硅陶瓷的热导率最高,为85.4W/m·K;添加YbM烧结助剂的氮化硅陶瓷也有较高的热导率,但体电阻率较低.组织分析表明,添加不同稀土元素的烧结体组织形貌基本相同,晶界相不同,添加DyM,YbM和YM烧结助剂的氮化硅陶瓷在烧结过程中分别形成了含氧晶界相Dy2Si3N4O3,Yb2Si3N2O5和Y2Si3N3O4.
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