采用真空坩埚下降法在石墨坩埚中生长了大尺寸CaF2晶体.通过高温氟化获得无水高纯原料,自发成核发育籽晶,以＜2mm/h的生长速率,成功生长了直径170mm的CaF2晶体.研究了晶体的顶部析晶形貌、包裹体、解理等生长缺陷.
参考文献
| [1] | Mouchanov A;Hilburger U;Driedrich J et al.Experimental Verification of the numerical Model for a CaF2 Crystal Growth Progress[J].Crystal Research and Technology,2002,37(01):77-82. |
| [2] | Axel Engel;Konrad Knapp;Lutz Aschke et al.Developent and Investigation of High Quality CaF2 used for 157nm Micro Lithography[J].Proceedings of SPIE,2001,4346:1183-1189. |
| [3] | 董永军,周国清,苏良碧,杨卫桥,徐军.温梯法生长CaF2晶体中包裹物的研究[J].人工晶体学报,2004(01):31-34. |
| [4] | Tetsuo Yonezawa;Kentaro Matsuo;Jun Nakayama;Yoji Kawamoto .Behaviors of metal-oxide impurities in CaF_2 and BaF_2 single-crystals grown with PbF_2 scavenger by Stockbarger's method[J].Journal of Crystal Growth,2003(3/4):385-393. |
| [5] | J.M.Ko;S.Tozawa;A.Yoshikawa .Czochralski growth of UV-grade CaF_2 single crystals using ZnF_2 additive as scavenger[J].Journal of Crystal Growth,2001(1/2):243-248. |
| [6] | 苏良碧,董永军,杨卫桥,周国清,周圣明,赵广军,徐军.CaF2晶体的生长与光学性能[J].人工晶体学报,2004(01):88-91. |
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