Pd基光学氢敏感薄膜材料是光学氢敏感薄膜材料最为重要的一类,主要包括Pd,Pd/Ni合金,Pd/WO3,Pd/MoO3,Pd/TiOx,Pd/MoS2等薄膜材料.本文从这类薄膜材料的制备、性能及应用方面,对Pd基光学氢敏感薄膜材料的研进展作了详细的论述.目前Pd基光学氢敏感薄膜材料的制备主要还是应用射法.在所有钯基氢敏感材料中以Pd膜的性能最佳,但是由于在应用过程中在Pd膜出现表面起泡、层错和钯膜与载体结合能力下降等缺陷,因此Pd/Ni金,Pd/WO3,Pd/MoO3,Pd/TiOx,Pd/MoS2等薄膜材料相继被开发.但目前上述膜材料在研究和应用中仍然存在许多问题,本文在论述中分别提出了上述料目前研究中存在的问题以及今后的发展方向.
参考文献
| [1] | Lundstrom I .Hydrogen Sensitive MOS-Structure[J].Principles and Applications Sensors and Actuators,1981,1:403. |
| [2] | Lundstrom I;Soderberg D .Hydrogen Sensitive MOS-Structure[J].Characterization,Sensors and Actuators,1982,2:105. |
| [3] | Rehihua W;Fortunato G;Amico A D .The Correlation of the Transient Current Response of H2 Absorption and Desorption with the H2 Sensitivity in Pd-Gated MOS Capacitor[J].Sensors and Actuators,1985,7:253. |
| [4] | Steele M C;Hile J W;Maclver B A .Hydrogen-Sensitive Palla- dium Gate MOS Capacitor[J].Journal of Applied Physics,1976,47:2537. |
| [5] | Lundstrom I;Shivaraman M S;Svensson C .A Hydrogen Sensitive Pd-Gate MOS Capacitor[J].Journal of Applied Physics,1975,46:3876. |
| [6] | Amico A D;Fortunato G;Petrocco G .Transport Properties of Pd Insulator α-Si:H Schottky Diode for Hydrogen Detection[J].Sensors and Actuators,1983,4:349. |
| [7] | Amico A D;Zemel J N .Pyroelectric Enthalpimetric Detection[J].Journal of Applied Physics,1985,57(02):460. |
| [8] | Amico A D;Palma A;Verona E .Palladium-Surface Acoustic Wave Interaction for Hydrogen Detection[J].Applied Physics Letters,1982,41:300. |
| [9] | Amico A D;Palma A;Verona E .Surface Acoustic Wave Hydrogen Sensor[J].Sensors and Actuators,1982,3:31. |
| [10] | Sekimoto S.;Okazaki S.;Fukuda K.;Asakura S.;Shigemori T. Takahashi S.;Nakagawa H. .A fiber-optic evanescent-wave hydrogen gas sensor using palladium-supported tungsten oxide[J].Sensors and Actuators, B. Chemical,2000(1/3):142-145. |
| [11] | Mandelis A.;Garcia JA. .Pd/PVDF thin film hydrogen sensor based on laser-amplitude-modulated optical-transmittance: dependence on H-2 concentration and device physics[J].Sensors and Actuators, B. Chemical,1998(3):258-267. |
| [12] | Armgarth M;Nylander C .Blister Formation in Pd Gate MIS Hydrogen Sensors.IEEE Electron[J].Device Lett,1982,EDL-3:384-386. |
| [13] | LEWIS F.The Palladium Hydrogen System[M].New York:Academic Press,1967 |
| [14] | Shivaraman M;Svensson C .Control of Palladium Adherence to Silicon Dioxide for Photolithographic Etching[J].Journal of the Electrochemical Society,1976,125:1258. |
| [15] | Chadwick B;Tann J;Brungs M;Gal M .A Hydrogen Sensor Based on the Optical Generation of Surface Plasmons in a Palladium Alloy[J].Sensors and Actuators B-Chemical,1994,17:215-220. |
| [16] | Brodowsky H;Husemann H .Wasserstoff in Palladiumlegie- rungen,Ber Bunsenges[J].Physical Chemistry,1996,70:626-630. |
| [17] | Xuezhi Ke;Gert Jan Kramer .Absorption and Diffusion of Hydrogen in Palladium-Silver Alloys by Density Functional Theory[J].Physical Review B,2002,184:1-11. |
| [18] | Sekimoto S;Nakagawa H;Okazaki S et al.Fiber-Optic Evanescent-Wave Hydrogen Gas Sensor Using Palladium- Supported Tungsten Oxide[J].Sensors and Actuators,1998,B66:142-145. |
| [19] | Lee KH.;Lee WJ.;Ho JJ.;Chen KH.;Liao KC.;Fang YK. .Novel electrochromic devices (ECD) of tungsten oxide (WO3) thin film integrated with amorphous silicon germanium photodetector for hydrogen sensor[J].Sensors and Actuators, B. Chemical,2000(1/2):96-99. |
| [20] | Yong-su Oh;Junichi Huamgami;Yuichi Watanabe;Masasuke Takata .Preparation and Characterization of an Optically- Detectable Hydrogen Gas Sensor Consisting of Pd/WO3 Thin Films[J].Sensors and Actuators B-Chemical,1993,13-14:547-548. |
| [21] | Jun-ichi Hamagmi;Yong-su Oh;Yuichi Watanabe;Masasuke Takata .Preparation and Characterization of an Optically Detectable H2 Gas Sensor Consisting of Pd/MoO3 Thin Films[J].Sensors and Actuators B-Chemical,1993,13-14:281-283. |
| [22] | Betz G;Tributsch H;Marchand R .Hydrogen Insertion (Inter- calation) and Light Induced Proton Exchange at TiO2(B)- Electrodes[J].Journal of Applied Electrochemistry,1984,14:315-322. |
| [23] | Miremadi Bijian K;Singh Ravi C;Morrison S Roy .A Highly Sensitive and Selective Hydrogen Gas Sensor from Thick Oriented Films of MoS2[J].Applied Physics A:Materials Science and Processing,1996,A63:271-275. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%