将高压铝电解电容器用腐蚀铝箔在硼酸电解质溶液中进行530 V阳极氧化,应用透射电镜、X射线衍射与交流阻抗对比研究了阳极氧化对铝箔实施500℃×2 min热处理前后对表面高压阳极氧化膜的微观结构与电化学特征的影响。结果表明：高压阳极氧化膜具有明显的层状结构特征,外层晶化程度较低、晶粒细小;内层晶化程度较高、晶粒较为粗大;热处理后可以显著提高氧化膜各层的结晶程度、单位厚度阳极氧化膜耐电场强度增加,减弱了对铝箔表面隧道微孔的堵塞程度,氧化膜表观比电容相应增大,热处理及其随后的修补化成提高了阳极氧化膜的致密程度,氧化膜表观比电阻也相应增加。
Aluminum capacitor foils with tunnel etch structure were reacted with boiling water and were then anodized at 530 V in boric acid solution.During anodization,some Al foils were treated at 500 ℃ for 2 min and the others were not.Specimens of oxide film on etched Al foil were successfully prepared with focused ion beam thinning technique for TEM examination.The effect of heat treatment on microstructure,crystallinity and electrochemical performance of the anodized oxide film was examined by TEM,XRD and EIS.The results show that the film consists of distinct inner and outer layers.The crystallization with smaller crystallites in the outer layer are less than those in the inner layer.However,the heat treatment is favorable to improving the crystallinity and field strength of the film,which can reduce the tendency of the film to block up tiny etch tunnels of the Al foil and increase its specific capacitance.The heat treatment and following reanodization can also enhance the compact of the film,leading to increase its apparent specific resistance.
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