以正硅酸乙酯(TEOS)为有机硅源,采用溶胶-凝胶技术,通过调节添加剂控制溶胶溶液性能,然后分别用光固化和传统电阻炉固化两种不同的热处理方案,制备出低折射率SiO2光学减反薄膜.分别采用椭偏仪、扫描电镜等对所制备薄膜的结构、物性进行研究.研究结果表明:光固化比传统电阻炉固化减反膜折射率低.
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