利用溶胶凝胶工艺在Pt电极上沉积了PZT薄膜,选用传统退火及其快速退火工艺制备两种Pt基底(CTA-Pt和RTA-Pt),并采用X射线衍射广角及其ù扫描技术分别研究了Pt电极退火工艺对溶胶凝胶PZT结构及其织构演化的影响.研究结果显示:在传统退火工艺制备Pt电极上沉积的薄膜为(111)择优取向,而在快速退火工艺制备Pt电极上沉积的薄膜表现为(100)织构;分析表明PZT薄膜的织构演化可能与Pt电极在不同退火工艺下的内应力差异有关.
Lead zirconate titanate(PZT) films were fabricated by sol-gel technique on different Pt electrode layers,i.e.,CTA-Pt and RTA-Pt,which were subjcoted to conventional thermal annealing and rapid thermal annealing,respectively.The microstructures and phase compositions of sol-gel-derived PZT films were analyzed.Effects of Pt electrode subjected to different annealing processing on the texture of PZT films were investigated by using ù-scan X-ray diffraction.The results indicated that the PZT thin films on CTA-Pt electrode were(111)-textured for various annealing temperatures,whereas the PZT films on the RTA-Pt electrode were(100)-textured.A possible scheme in consideration of the internal stress effect of Pt electrode was proposed to explain the texture evolution of films.
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