单晶硅制绒中影响金字塔结构因素的分析

人工晶体学报, 2010, 39(4): 857-861.

单晶硅制绒中影响金字塔结构因素的分析

李海玲 ^1, , 赵雷 ^2, , 刁宏伟 ^3, , 周春兰 ^4, , 王文静 ^5,

1.中国科学院电工研究所太阳能电池组太阳能热利用及光伏系统重点实验室,北京,100190

2.中国科学院电工研究所太阳能电池组太阳能热利用及光伏系统重点实验室,北京,100190

3.中国科学院电工研究所太阳能电池组太阳能热利用及光伏系统重点实验室,北京,100190

4.中国科学院电工研究所太阳能电池组太阳能热利用及光伏系统重点实验室,北京,100190

5.中国科学院电工研究所太阳能电池组太阳能热利用及光伏系统重点实验室,北京,100190

基金项目: 中国科学院知识创新工程重要方向项目(KGCX2-YW-382)

关键词：单晶硅 , 表面制绒 , 腐蚀速率 , 成核与生长

Analysis on Factors Influencing Pyramidal Structure in Texturing Monocrystalline Silicon Process

本文通过不同碱性溶液及添加不同活性剂制备出的具有不同金字塔结构的绒面,并探讨了影响金字塔成核的因素.采用扫描电镜和紫外-可见分光光度计对绒面的金字塔结构和反射特性进行了分析,结果表明腐蚀速率与金字塔尺寸成正比,金字塔结构影响绒面减反特性.最后对造成金字塔结构差异的原因和金字塔成核过程进行了分析.

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材料期刊网

单晶硅制绒中影响金字塔结构因素的分析

Analysis on Factors Influencing Pyramidal Structure in Texturing Monocrystalline Silicon Process

参考文献