利用直流反应磁控溅射法在表面覆盖有Si3N4薄膜的Si(100)基片上制备了不同厚度的氧化钒薄膜.用光谱式椭偏仪对薄膜的厚度进行了测试.采用四探针测试系统对制备的薄膜进行了方阻和方阻温度系数的分析,发现薄膜的厚度对薄膜的电学特性有很大的影响.实验结果表明氧化钒薄膜的厚度调整可作为调控氧化钒薄膜性能的一种重要工艺手段.
参考文献
| [1] | Adler D .Mechanisms fo r metal-nonmetal transitions in transition metal oxides and sulfides[J].Reviews of Modern Physics,1968,40(04):714. |
| [2] | Chiarello G.;Amoddeo A.;Caputi LS.;Colavita E.;Barberi R. .XPS AND AFM CHARACTERIZATION OF A VANADIUM OXIDE FILM ON TIO2(100) SURFACE[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1996(1):15-19. |
| [3] | Surnev S;Ramsey M G;Netzer F P .Vanadium oxide Surface studies[J].Prog Surf Studies,2003,73(4-8):117. |
| [4] | Ottaviano L;Pennisi A;Simone F et al.RF sputtered electrochromic V2O5films[J].Optical Materials,2004,27(20):307. |
| [5] | Takahashi K;Wang Y;Cao GZ .Growth and electrochromic properties of single-crystal V2O5 nanorod arrays[J].Applied physics letters,2005(5):3102-1-3102-3-0. |
| [6] | Yarnamura T;Watanabe N;Shiokawa Y .Energy efficiency of neptunium redox battery in comparison with vanadiurn baRery[J].Journal of Alloys and Compounds,2006,408-412:1260. |
| [7] | Chen SH;Ma H;Yi XJ;Xiong T;Wang HC;Ke CJ .Smart VO2 thin film for protection of sensitive infrared detectors from strong laser radiation[J].Sensors and Actuators, A. Physical,2004(1):28-31. |
| [8] | Lampert CM. .Large-area smart glass and integrated photovoltaics[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2003(4):489-499. |
| [9] | Tissot JL .IR detection with uncooled sensors[J].Infrared physics and technology,2004(1/2):147-153. |
| [10] | Murphy D;Ray M;Kennedy A et al.Expanded applications for high performance VOx microbolometer FPAs[J].Proceedings of SPIE-The International Society for Optical Engineering,2005,5783:448. |
| [11] | Sung Moon .Novel infrared absorbing material coupled uncooled microbolometer[J].Proc IEEE Sens,2004,2:658. |
| [12] | A. K. Kulkarni;Kirk H. Schulz;T. S. Lim;M. Khan .Dependence of the sheet resistance of indium-tin-oxide thin films on grain size and grain orientation determined from X-ray diffraction techniques[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(2):273-277. |
| [13] | Knickerbocker S A .[D].Michigan Technological University,1995. |
| [14] | 袁宁一,李金华,李格.隧道穿透对Sol-gel多晶二氧化钒薄膜电阻率的影响模拟[J].红外与毫米波学报,2004(04):317-320. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%