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微型电阻焊是一种重要的微连接技术,在微电子、MEMS和医疗器械制造领域得到了广泛应用.从微型电阻焊的原理和主要工艺参数出发,综述了这一技术近年来国内外的研究状况,重点总结了微型电阻焊接头形成机理、材料焊接性、焊接过程数值仿真和质量监控方法等方面的研究进展,最后指出了当前存在的问题及未来的研究方向.

Resistance microwelding (RMW) is an important microjoining technology, which is extensively ap-plied in the fabrication of microelectronics, MEMS and medical devices. In this paper, the principle and main processparameters of RMW are presented. The research status of RMW in recent years at home and abroad, relating to joi-ning mechanism, weldability, process numerical simulation, quality monitoring and controlling, are reviewed. Thecurrent problems and future researching direction on RMW are also mentioned.

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