简要评述了磁控溅射法制备氮化碳(CNx)薄膜的研究进展的现状,以及磁控溅射法制备氮化碳(CNx)薄膜过程中工艺参数对薄膜的结构和性能的影响,展望了氮化碳研究的发展趋势.
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