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采用真空热蒸发和磁控溅射两种方法沉积铝膜,通过对Glass/Si/SiO2/Al叠层结构进行铝诱导晶化(AIC)制备多晶硅薄膜.采用X射线衍射谱(XRD)、光学显微镜和拉曼光谱对样品进行分析,研究两种铝膜沉积工艺对AIC法制备多晶硅性能的影响.结果表明,采用两种方法沉积的铝膜均能诱导出(111)高度择优取向的大晶粒尺寸(~100μm)的多晶硅薄膜,但与磁控溅射沉积相比,真空热蒸发沉积的铝膜诱导出的多晶硅薄膜应力更小、结晶质量更高,且晶化速率更快.

参考文献

[1] 张良艳,林祖伦,祁康成,韦新颖.金属Ni诱导非晶硅薄膜晶化研究[J].电子器件,2010(01):10-12.
[2] 王红娟,吕晓东,黄义定,仲志国.快速热退火制备多晶硅薄膜的研究[J].电子元件与材料,2009(04):55-57.
[3] 王红娟,张帅.多晶硅薄膜材料与器件研究进展[J].南阳师范学院学报,2009(03):42-47.
[4] 夏冬林,杨晟,赵修建.铝诱导晶化P型非晶硅薄膜实验研究[J].纳米科技,2005(05):60-63.
[5] 刘莉莹,张家良,郭卿超,王德真.大气压等离子体辅助多晶硅薄膜化学气相沉积参数诊断[J].物理学报,2010(04):2653-2660.
[6] Nguyen, TN;Jung, S;Yi, J .Advanced Solid-Phase Crystallization of Amorphous Silicon on a Glass Substrate[J].Journal of the Korean Physical Society,2009(6):2367-2372.
[7] Yang, Y.-H.;Ahn, K.-M.;Ahn, B.-T. .Fabrication of polycrystalline Si films by vapor-induced crystallization and rapid thermal annealing process[J].Electrochemical and solid-state letters,2010(8):J92-J95.
[8] Nast O.;Koschier LM.;Sproul AB.;Wenham SR.;Puzzer T. .Aluminum-induced crystallization of amorphous silicon on glass substrates above and below the eutectic temperature[J].Applied physics letters,1998(22):3214-3216.
[9] Tang ZX;Shen HL;Lu LF;Song SG;Yin YG;Li D;Huang HB .Strong preferential (111) orientation of large-grained polycrystalline silicon thin films prepared by AIC[J].Journal of optoelectronics and advanced materials,2008(6):1515-1518.
[10] 唐正霞,沈鸿烈,解尧,鲁林峰,江枫,沈剑沧.100μm大晶粒多晶硅薄膜的铝诱导法制备[J].功能材料,2010(03):453-456.
[11] Oliver Nast;Andreas J. Hartmann .Influence of interface and Al structure on layer exchange during aluminum-induced crystallization of amorphous silicon[J].Journal of Applied Physics,2000(2):716-724.
[12] Oliver Nast;Stuart R. Wenham .Elucidation of the layer exchange mechanism in the formation of polycrystalline silicon by aluminum-induced crystallization[J].Journal of Applied Physics,2000(1):124-132.
[13] Ekanayake G;Reehal HS .Poly-silicon thin films by aluminium induced crystallisation of microcrystalline silicon[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2006(3):272-278.
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