薄膜体声波滤波器作为一种发展高频滤波器的全新解决方案,比声表面波滤波器(SAWF)、陶瓷介质滤波器具有更高的Q值,低的损耗和在高频时具备更高的功率承受能力.介绍了薄膜体声波谐振器的研究历史和研究概况,薄膜体声波谐振器的原理和3种典型结构,具体阐述了薄膜体声波谐振器的关键技术及其材料体系的要求.
参考文献
| [1] | 刘燕翔,任天令,刘理天.采用PZT薄膜的体声波RF滤波器设计[J].压电与声光,2001(01):1-4. |
| [2] | Kang YR;Kang SC;Paek KK;Kim YK;Kim SW;Ju BK .Air-gap type film bulk acoustic resonator using flexible thin substrate[J].Sensors and Actuators, A. Physical,2005(1):62-70. |
| [3] | Lakin K M .A review of thin-film resonator technology[J].IEEE Microwave Magazine,2003,4(04):61. |
| [4] | 陈炜 .薄膜体声波滤波器（FBAR）的研究与建模[D].浙江大学,2005. |
| [5] | Morkner H R;R Frank M .An intergrated FBAR filter and PHEMT switched-amp for wireless applications[J].IEEE MTT-S Int,1999,4(13-19):1393. |
| [6] | Aigner R.High performance RF-Filters suitable for above IC integration:Film Bulk-Acoustic-Resonators (FBAR)on Silicon[A].,2003:141. |
| [7] | Satoh Y et al.Development of piezoelectric thin film resonator and its impact on future wireless communication systems[J].Japanese Journal of Applied Physics Part 1,2005,44(5A):2883. |
| [8] | Huang C L;Tay K W;Wu L .Fabrication and performance analysis of film bulk acoustic wave resonators[J].Materials Letters,2005,59(8-9):1012. |
| [9] | Chung-Hsien Lin;Hong-Ren Chen;Weileun Fang .Design and fabrication of a miniaturized bulk acoustic filter by high aspect ratio etching[J].Journal of Microlithography, Microfabrication, and Microsystems. (JM3),2005(3):033010-1-7-0. |
| [10] | Aigner R.MEMS in RF-filter applications:Thin film bulk-acoustic-wave technology[A].Piscataway,NJ,United States,2005 |
| [11] | Si-Hyung Lee;Ki Hyun Yoon;Jeon-Kook Lee .Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators[J].Journal of Applied Physics,2002(7):4062-4069. |
| [12] | Newell W E .Face-mounted piezoelectric resonators[J].Proceedings of the IEEE,1965,53:575. |
| [13] | Lakin K M;Wang J S .[J].UHF Composite Bulk Wave Resonators,1980,2:834. |
| [14] | Kirby P B.PZT thin film bulk acoustic wave resonators and filters[A].,2001:687. |
| [15] | Richard Rudy;John Larson P B.Ultra-miniature high-Q filters and duplexers using FBAR technology[A].,2001:120. |
| [16] | Kim K W;J G Y;Gu M G.TFBAR Filters for 2 GHz Wireless Applications[A].,2002:1181. |
| [17] | Lobl H P et al.Materials for bulk acoustic wave (BAW)resonators and filters[M].Elsevier Science,2001,21:2633. |
| [18] | 唐孝明,唐高弟,张海.薄膜体声波谐振器技术[J].微纳电子技术,2005(08):380-383. |
| [19] | 张福学.现代压电学[M].北京:科学出版社,2002:99. |
| [20] | Loebl H P et al.RF bulk acoustic wave resonators and filters[J].Journal of Electroceramics,2004,12(1-2):109. |
| [21] | Loebl HP.;Klee M.;Metzmacher C.;Brand W.;Milsom R.;Lok P. .Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators[J].Materials Chemistry and Physics,2003(2/3):143-146. |
| [22] | Lee J B.Deposition of ZnO thin films by magnetron sputtering for a film bulk acoustic resonator[M].Jeju Island,South Korea:Elsevier,2003 |
| [23] | Ferblantier G;Mailly F;Al Asmar R;Foucaran A;Pascal-Delannoy F .Deposition of zinc oxide thin films for application in bulk acoustic wave resonator[J].Sensors and Actuators, A. Physical,2005(2):184-188. |
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