采用电化学沉积法,在ITO导电玻璃及钛片上沉积Bi2-xSbxTe3热电薄膜.采用循环伏安、SEM、XRD、EDX等技术分别对电化学沉积过程和薄膜的形貌、相结构、组成进行研究,并对其室温时的热电性能进行测试.结果表明,在含有Bi3+、HTeO2+和SbO+的硝酸溶液中,采用控电位沉积模式,可以实现铋、锑、碲三元共沉积,得到Bi2-xSbxTe3薄膜.薄膜热处理前用冷等静压处理可以提高薄膜的密实度和平整度,并有利于热电性能的提高.
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