软计算是一些计算方法的集合,这些计算方法的指导思想均是通过对不精确性和不确定性的容纳,以达到可处理性、鲁棒性和低成本求解的目的;它主要由模糊逻辑、神经网络、进化计算等组成.综述了软计算在CVD/CVI工艺建模中的应用情况.
参考文献
[1] | Zadeh L.A. .Soft computing and fuzzy logic[J].IEEE Software,1994(6):48-56. |
[2] | 张智星;孙春在;水谷英二;张平安,高春华.神经--模糊和软计算(Neuro--Fuzzy and Soft Computing)[M].西安:西安交通大学出版社,2000 |
[3] | Kim J;Moon Y;Zeigler B P .[J].IEEE Control Systems Magazine,1995,15(03):66. |
[4] | Baraldi A;Blonda P .[J].IEEE Transactions on Systems Man and Cybernetics-Part B:Cybernetics,1999,29(06):778. |
[5] | Baraldi A;Blonda P .[J].IEEE Transactions on Systems Man and Cybernetics-Part B:Cybernetics,1999,29(06):786. |
[6] | Eberhart R C;Dobbins R W;Hutton L V.Computer-Based Medical Systems[A].,1991:298. |
[7] | 樊新民,孔见,金波.人工神经网络在材料科学研究中的应用[J].材料导报,2002(04):28-30,21. |
[8] | 姜开宇,李贺军,李克智.2D碳/碳复合材料CVI过程的数值模拟研究[J].宇航学报,1999(04):104-107. |
[9] | Hou Xianghui,Li Hejun,Liu Yinglou.Finite difference model for simulation of densifying carbon-carbon composites by chemical vapor infiltration processes[J].航空学报,1999(01):34. |
[10] | HOUXH;Li H J;Chen Y X et al.[J].Carbon,1999,37:669. |
[11] | LI Kezhi,LI Hejun,JIANG Kaiyu,HOU Xianghui.Numerical simulation of isothermal chemical vapor infiltration process in fabrication of carbon-carbon composites by finite element method[J].中国科学E辑(英文版),2000(01):77-85. |
[12] | Chiou J.C.;Yang J.Y. .A CVD epitaxial deposition in a vertical barrel reactor: processmodeling using cluster-based fuzzy logic models[J].IEEE Transactions on Semiconductor Manufacturing: A Publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council,1998(4):645-653. |
[13] | Nadi F.;Agogino A.M. .Use of influence diagrams and neural networks in modeling semiconductor manufacturing processes[J].IEEE Transactions on Semiconductor Manufacturing: A Publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council,1991(1):52-58. |
[14] | 李贺军,徐志淮.人工神经网络用于炭/炭复合材料CVD SiC涂层的研究[J].炭素技术,1999(02):17-20. |
[15] | 徐志淮,李贺军,李克智.SiC-CVD过程的人工神经网络建模[J].硅酸盐学报,2000(01):25-29. |
[16] | Geisler J.P.;Lee C.S.G.;May G.S. .Neurofuzzy modeling of chemical vapor deposition processes[J].IEEE Transactions on Semiconductor Manufacturing: A Publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council,2000(1):46-60. |
[17] | Han S S;Cai L;May G S et al.[J].IEEE Transactions on Semiconductor Manufacturing,1996,9(03):303. |
[18] | Han S S;May G S .[J].IEEE Transactions on Semiconductor Manufacturing,1997,10(02):279. |
[19] | Han S.S.;Ceiler M. .Modeling the properties of PECVD silicon dioxide films using optimized back-propagation neural networks[J].IEEE Transactions on Components, Packaging, and Manufacturing Technology. Part A,1994(2):174-182. |
[20] | Han S S;May G S.[A].,1994:760. |
[21] | Liau LCK.;Huang CJ.;Chen CC.;Huang CS.;Chen CT.;Lin SC.;Kuo LC. .Process modeling and optimization of PECVD silicon nitride coated on silicon solar cell using neural networks[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2002(2):169-179. |
[22] | GhoshS;Dutta P K;Bose D N .[J].Materials Science in Semiconductor Processing,1999,2(01):1. |
[23] | Rosen I G;Parent T;Cooper C et al.[J].IEEE Transactions on Control Systems Technology,2001,9(02):271. |
[24] | Bhatikar S.R.;Mahajan R.L. .Artificial neural-network-based diagnosis of CVD barrel reactor[J].IEEE Transactions on Semiconductor Manufacturing: A Publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council,2002(1):71-78. |
[25] | Hussain M A .[J].Artificial Intelligence in Engineering,1999,13:55. |
[26] | 何险峰,周家驹.遗传算法及其在化学化工中的应用[J].化学进展,1998(03):312-318. |
[27] | 许禄,胡昌玉.化学中的人工神经网络法[J].化学进展,2000(01):18-31. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%