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软计算是一些计算方法的集合,这些计算方法的指导思想均是通过对不精确性和不确定性的容纳,以达到可处理性、鲁棒性和低成本求解的目的;它主要由模糊逻辑、神经网络、进化计算等组成.综述了软计算在CVD/CVI工艺建模中的应用情况.

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