文章综述了锆钛酸铅(PZT)薄膜的主要制备方法,其中包括射频磁控溅射法、脉冲激光沉积法、溶胶-凝胶法和金属有机化学气相沉积法.讨论了不同工艺参数对于PZT薄膜的结构和性能的影响,并针对PZT薄膜出现的疲劳现象进行掺杂改性,探讨提高其抗疲劳性能的途径.
Lead zirconate titanate (PZT) films for its excellent ferroelectric and piezoelectric properties have been attended extensively.This paper reviewed main preparation methods of the PZT films,such as RF magnetron sputtering method,pulse laser deposition method,sol-gel method and metal organic chemical vapor deposition.Influence of process parameters on the structure and performance of PZT thin films is discussed and improvement of fatigue performance by doping is explored.
参考文献
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