采用多弧离子镀技术，用Ti-Al-Zr合金靶和Cr靶，在 W18Cr4V高速钢基体上沉积了(Ti, Al, Zr,\linebreak Cr)N多元膜，并进行了600 ℃，700 ℃，800 ℃和900 ℃短时(4 h)高温氧化实验及 700 ℃和800 ℃长期(100 h) 高温循环氧化实验。用扫描电镜 (SEM)、能谱(EDS)和X射线衍射(XRD)观察和分析样品表面氧化膜。结果表明，这种多元膜在短时(4 h)高温氧化条件下，800 ℃时仍具有良好的抗高温氧化性，XRD显示氧化膜主要为TiO2；在长期(100 h)高温氧化条件下，该多元膜的抗高温氧化温度大约为700 ℃左右
Using Ti-Al-Zr target and pure Cr target, the multi-component nitride films, (Ti, Al, Zr, Cr) N, were deposited on the substrates of high speed steel (W18Cr4V) by multi-arc ion plating technique. The high temperature oxidation of the film was carried out in the case of both the short-time (600 ℃, 700 ℃, 800 ℃ and 900 ℃ for 4 h) and long-time (700 ℃ and 800 ℃ for 100 h) tests. All of the specimens were characterized by scanning electron microscopy (SEM), energy dispersion X-ray spectroscopy (EDS) and X-ray diffraction (XRD). It was shown that the high temperature oxidation resistance of the film was up to 800 ℃ in case of short-time oxidation, and TiO2 formed on the (Ti, Al, Zr, Cr) N film; while oxidation resistance of the film was up to 700 ℃\linebreak in case of long-time oxidation.
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