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The effect of pre-strain on phase transformation of TiNi shape memory alloy film was studied by differential scanning calorimeter measurement(DSC).Compared with undeformed TiNi film,the reverse transformation of pre-strained specimens was elevated to a higher temperature on the first heating,but martensite and reverse transformation on subsequent thermal cycles occurred at a lower temperature.The evolution of transformation behavior in pre-strained TiNi film was related to the change of elastic strain energy,irreversible energy and internal stress field.

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