采用电弧离子镀技术制备了不同成分的Cr-O-N薄膜作为NiCrAlY涂层与高温合 金基材DSM11之间的扩散阻挡层. 研究了不同O2和N2流量对Cr-O-N薄膜的相含量的影响及 对NiCrAlY/Cr-O-N/DSM11体系薄膜结合强度的影响. 实验结果表明，Cr-O-N是 由Cr2O3和CrN组成的多晶膜, 两相的相对含量随O2和N2流量改变而发生变化. 扩散阻挡 层抑制元素扩散的同时降低了NiCrAlY涂层与基体间的结合强度, 且随着阻挡层中氧含量 的增加结合强度逐渐下降. 适当的氧含量可以使NiCrAlY/Cr-O-N/DSM11涂层体系具有良 好的结合强度和抗元素扩散能力.
Cr-O-N films with different chemical composition were deposited using arc ion plating (AIP) between NiCrAlY coatings and the DSM11 substrate as diffusion barriers. The influences of the barriers and the roughness of the substrate on the adhesion of DSM11/Cr-O-N/NiCrAlY were investigated. In general, we observed that the NiCrAlY coating without diffusion barrier has the best adhesion. After including the Cr-O-N films, the adhesion decreased with the increasing oxygen flow rate and the adhesion of the wet blasting substrate is higher than the polishing substrate.
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