简述了PZT铁电薄膜在制备和应用当中遇到的问题.围绕提高薄膜的疲劳性能,介绍了PZT铁电薄膜近年来在热处理、底电极、过渡层和掺杂等方面的研究进展,并分析了它们对材料电性能和疲劳性能的影响.最后提出了展望.
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