研究了阳极氧化电压、氧化时间和电解液的浓度对纯钛表面形成的阳极氧化薄膜形貌的影响.在氧化电压为20 V, HF溶液浓度为0.5%(质量分数,下同),氧化时间为60 min的条件下,可在纯钛表面获得分布比较均匀的微米级多孔氧化膜,孔径为1.5~2.2 μm.经500℃,1 h处理后,该薄膜成为锐钛矿结构的TiO2.可以通过控制工艺参数,使得TiO2钝化膜的局部溶解速率大于形成速率来获取这种微米级多孔TiO2薄膜.
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