通过扫描电镜、扫描探针显微镜和电子背散射衍射仪对改进的Chen法腐蚀液在Hg3In2Te6(111)晶片上形成的腐蚀坑进行了研究.实验发现,腐蚀坑形貌主要有线形、梭形、枣形3种,且后两者的沟槽在(111)面的投影只有3种取向,并互成120°夹角.进一步分析的结果表明,上述蚀坑的形成可由螺位错双交滑移的模型加以解释.
参考文献
[1] | L. A. Kosyachenko;Yu. S. Paranchich;V. N. Makogonenko;V. M. Sklyarchuk;E. F. Sklyarchuk;I. I. German .Electrical Performance of HgInTe Surface-Barrier Photodiodes[J].Technical physics,2003(5):647-650. |
[2] | P. N. Gorlei;O. G. Grushka .An Impurity Band in Hg_3In_2Te_6 Crystals Doped with Silicon[J].Semiconductors,2003(2):168-171. |
[3] | Grushka O;Gorlei P;Bestsennyi A et al.[J].Semiconductors,2000,34(10):1147-1150. |
[4] | Gorlei P;Grushka O;Frasunyak V .[J].Semiconductors,2002,36(05):501-504. |
[5] | Malik A I;Vieira M;Fernandes M et al.Near-infrared Photodetectors Based on a HgInTe-Semiconductor Compound[J].PROCEEDINGS OF THE SPIE,1999,3629:433. |
[6] | Grushka Z M;Gorley P N;Grushka O G et al.Mercury Indium Telluride-a New Promising Material for Photonic Structures and Devices[J].PROCEEDINGS OF THE SPIE,2006,6029:60291A. |
[7] | 董阳春,王领航,介万奇.近红外半导体材料HgInTe的缺陷腐蚀[J].人工晶体学报,2008(03):627-630,638. |
[8] | Linghang Wang;Wanqi Jie;Yang Yang;Gang Xu;Li Fu .Defect characterization and composition distributions of mercury indium telluride single crystals[J].Journal of Crystal Growth,2008(11):2810-2814. |
[9] | 杨杨,王领航,介万奇,王亚彬,傅莉.HgInTe晶片表面化学抛光研究[J].人工晶体学报,2009(02):535-538. |
[10] | GB/T 19501-2004.GB/T 19501-2004.电子背散射衍射分析方法通则[S]. |
[11] | Dash W C .[J].Journal of Applied Physics,1958,29:705. |
[12] | 陈进化.位错基础[M].上海:上海科学技术出版社,1984:115. |
[13] | 王亚男;陈树江;董希淳.位错理论及其应用[M].北京:冶金工业出版社,2007:67-68. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%