X射线衍射作为一种无损检测手段已经广泛应用于薄膜材料的结构分析和相分析.ω扫描和φ扫描都基于布拉格方程,可以对薄膜材料丝织构和面内织构进行表征.着重阐述了这两种扫描方式的X射线衍射几何、相关原理和在X射线四圆衍射仪实验过程中的实验参数设置,并介绍了它们的适用范围.最后列举了两种方法在金属薄膜、氧化物薄膜和半导体薄膜结构分析中的应用,显示出这两种表征手段在薄膜结构表征中的优势.
参考文献
| [1] | 麦振洪.薄膜结构X射线表征[M].北京:科学出版社,2007 |
| [2] | Zhu Zhen;Ma Jin;Luan Caina et al.Epitaxial relationships and optical properties of SnO2 films deposited on sapphire substrates[J].Applied Surface Science,2011,257(07):2516. |
| [3] | Preparation and structural properties of YBCO films grown on GaN/c-sapphire hexagonal substrate[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2010(18):P.5618. |
| [4] | Zhu Zhen;Ma Jin;Luan Caina et al.Epitaxial relationships and optical properties of SnO2 films deposited on sapphire substrates[J].Applied Surface Science,2011,257(20):2516. |
| [5] | Kim, G.;Jeong, A.R.;Jo, W.;Park, D.Y.;Cheong, H.;Shin, G.M.;Yoo, S.I. .Optimal growth conditions for GdBa_2Cu_3O_7 thin-film coated conductors characterized by polarized Raman scattering spectroscopy[J].Physica, C. Superconductivity and its applications,2010(20):1021-1024. |
| [6] | X.T. Li;P.Y. Du;L. Zhu;C.L. Mak;K.H. Wong .Structure and dielectric properties of highly (100)-oriented PST thin films deposited on MgO substrates[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(16):5296-5299. |
| [7] | Musil J;Zeman H;Kasl J .Relationship between structure and mechanical properties in hard Al-Si-Cu-N films prepared by magnetron sputtering[J].THIN SOLID FILMS,2002,413(1-2):121. |
| [8] | Siddhartha Mal;Tsung-Han Yang;P. Gupta .Thin film epitaxy and magnetic properties of STO/TiN buffered ZnO on Si(0 0 1) substrates[J].Acta materialia,2011(6):2526-2534. |
| [9] | Marion Birkholz.Thin film analysis by X-ray scattering[M].Weinheim,Germany:Wlley-VCH,2007 |
| [10] | 梁志德;王福.现代物理测试技术[M].北京:冶金工业出版社,2003 |
| [11] | Nitz V.;Schlomka JP.;Seeck OH.;Stettner J.;Press W.;Stelzle M.;Sackmann E.;Tolan M. .CORRELATIONS IN THE INTERFACE STRUCTURE OF LANGMUIR-BLODGETT FILMS OBSERVED BY X-RAY SCATTERING[J].Physical Review.B.Condensed Matter,1996(7):5038-5050. |
| [12] | 梁志德.织构材料的三维取向分析术-ODF分析[M].沈阳:东北工学院出版社,1986 |
| [13] | Stearns M B;Lee C H;Groy T L .Structural studies of Co/Cr multilayered thin films[J].Physical Review B,1989,40(12):8256. |
| [14] | 王力衡;黄运添;郑海涛.薄膜技术[M].北京:清华大学出版社,1991 |
| [15] | Lu Yafeng.Strained superlattices and magnetic tunnel junctions based on doped manganites[M].K(o)ln,Germany:GCA-Verlag,2001 |
| [16] | Fei W D;Liu C Q;Ding M H et al.Characterization of fiber texture by ω-scan X-ray diffraction[J].Rev Scienfic Instrum,2009,80(09):3903. |
| [17] | Song T K;Lee J K;Jung H J .Structural and ferroelectric properties of the c-axis oriented SrBi2 Ta2O9 thin films deposited by the radio-frequency magnetron sputtering[J].Applied Physics Letters,1996,69(25):3839. |
| [18] | Heteroepitaxial growth of CuInS_(2) thin films on sapphire by radio frequency reactive sputtering[J].Applied physics letters,2003(9):1743-1745. |
| [19] | Zhang X Y;Gall D .CrN electronic structure and vibrational modes:An optical analysis[J].Physical Review B,2010,82:045116. |
| [20] | Saito K.;Nukaga N.;Yamaji I.;Akai T.;Funakubo H.;Mitsuya M. .Method of distinguishing SrBi2Ta2O9 phase from fluorite phase using X-ray diffraction reciprocal space mapping[J].Japanese journal of applied physics,2000(9B):5489-5495. |
| [21] | Soon Ku Hong;Hang Ju Ko;Chen Yefan et al.Defect characterization in epitaxial ZnO/epi-GaN/Al2O3 heterostructures:Transmission electron microscopy and triple-axis X-ray diractometry[J].Journal of Crystal Growth,2000,209(2-3):537. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%