用一种推广的幂指数散射截面求解了溅射输运方程, 获得更加一般的渐近解.这个渐近解不但以Urbassek等人几年前所给出的两个解为其特殊情况, 而且还为作者提出的SC解提供了新的证据. 此外通过计算并分析了Vicanek等人发表的新的输运理论, 发现他们所提出的转换理论结果与Monte Carlo模拟结果一致是不正确的.
参考文献
[1] | Behrisch R.Sputtering by Particle Bombardment I[M].Berlin:Springer-Verlag,1981:65. |
[2] | Zhang Z L .[J].Nuclear Instruments and Methods in Physics Research B:Beam Interaction with Materials and Atoms,1999,149:272. |
[3] | Urbassek H M;Conrad U .[J].Nuclear Instruments and Methods in Physics Research B:Beam Interaction with Materials and Atoms,1992,69:413. |
[4] | Vicanek M;Conrad U;Urbassek H M .[J].Physical Review B,1993,47(02):617. |
[5] | Zhang Z L .[J].Nuclear Instruments and Methods in Physics Research B:Beam Interaction with Materials and Atoms,1999,152:252. |
[6] | Wilson W D;Haggmark L G;Biersack J P .[J].Physical Review B,1977,15:2458. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%