经溶胶-凝胶法制得纳米SiO2,用不同结构的双键硅烷偶联剂对其表面进行原位接枝改性,得到两种光敏纳米SiO2（M70SiO2和M50SiO2）,并将其添加到紫外光固化丙烯酸酯预聚物中,制得杂化光致抗蚀材料。通过测定光敏参数（D0n.5）考察其光敏性知,杂化光致抗蚀材料光敏性明显增加,当光敏纳米SiO2的质量分数增至13.7%～15.8%时,光敏参数达25 mJ/cm2～27 mJ/cm2;用差示扫描量热仪（DSC）及热机械分析（TMA）考察抗蚀材料的热性能,结果显示,随光敏纳米SiO2用量增加Tg升高,热膨胀系数减小,同时分辨率和精密性并未因光敏纳米SiO2的加入而降低。
Nano-SiO2 was prepared by sol-gel method,and photosensitivity nano-SiO2（M70SiO2 and M50SiO2） were obtained by in-situ grafting method using different silane coupling agents containing double bond.Then the hybrid photoresists were manufactured by incorporating photosensitivity nano-SiO2 into UV-curing acrylate prepolymer.The energy sensitivity was investigated by determining photosensitivity parameter（D0.5n）,and the results show that the photoresists with M70SiO2 and M50SiO2 have excellent photosensitivity.Furthermore,thermal properties of the hybrid photoresists were investigated with differential scanning calorimetry（DSC） and thermomechanical analysis（TMA）.Tg of cured films obviously increases,and the thermal expansion coefficient decreases.Meanwhile,the resolution and precision do not decrease due to the incorporation of M70SiO2 and M50SiO2.
参考文献
| [1] | 钱军民,金志浩.甲基丙烯酸甲酯-顺丁烯二酸酐共聚物/SiO2杂化材料的制备与性能[J].高分子材料科学与工程,2003(04):162-165. |
| [2] | Lv SC;Zhou W;Li S;Shi WF .A novel method for preparation of exfoliated UV-curable polymer/clay nanocomposites[J].European Polymer Journal,2008(6):1613-1619. |
| [3] | Karata?, S.;Ho?g?r, Z.;Apohan, N.-K.;Gungor, A. .Preparation and characterization of photopolymerizable organic-inorganic hybrid materials by the sol-gel method[J].Journal of Polymer Research,2010(2):247-254. |
| [4] | Huang CF;Kuo SW;Lin FJ;Huang WJ;Wang CF;Chen WY;Chang FC .Influence of PMMA-chain-end tethered polyhedral oligomeric silsesquioxanes on the miscibility and specific interaction with phenolic blends[J].Macromolecules,2006(1):300-308. |
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