通过自组装层法在SiO2基底上化学镀了Ni-Mo-P薄膜,薄膜的厚度和成分通过X射线荧光仪(XRF)测定.利用新型在线应力测试方法(相干梯度敏感法CGS)对退火过程中的应力进行了全场在线测试.结果表明,定量计算得到特定成分的生长应力为3.85 GPa;在600℃、700℃退火过程中,薄膜的应力首先出现轻微缓解,之后由于热应力作用,基底与薄膜边缘处易出现应力集中,应力值高达10.1 GPa,是薄膜断裂的高危区域;薄膜的平均残余应力经热处理后得到部分缓解.
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