以无水乙醇为溶剂、氨水为催化剂,利用正硅酸乙酯水解所得的SiO2微球为内核,以硝酸亚铈为铈源、六亚甲基四胺为沉淀剂,采用化学沉淀法制备了具有草莓状包覆结构的CeO2@SiO2复合颗粒.利用X射线衍射仪、透射电子显微镜、场发射扫描电镜、能谱仪、X射线光电子能谱仪、纳米激光粒度分布仪等对所制备样品的结构进行了表征.将所制备的包覆结构CeO2@SiO2复合磨料用于光学石英玻璃的化学机械抛光,采用原子力显微镜观察了抛光表面的微观形貌,并测量了表面粗糙度.结果表明,所制备的CeO2@SiO2复合颗粒呈规则球形,粒度分布均匀,粒径为150～200nm,且具有明显的草莓状包覆结构,大量纳米CeO2颗粒紧密包覆在SiO2表面.AFM测量结果表明,抛光后玻璃表面划痕得到明显改善,在10μm×10μm范围内表面粗糙度RMS值由1.65nm降至0.484nm.
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