利用阳极离子束技术在SKD11型不锈钢和YG6硬质合金上沉积类金刚石( DLC)薄膜,采用扫描电子显微镜、原子力显微镜、Raman光谱分析薄膜微观结构和表面形貌；采用WS-2005型附着力划痕仪和洛氏压力机测试膜基结合强度；采用球磨仪测试膜层耐磨性能。结果表明：利用该技术所制DLC膜是一种非晶结构、表面平整的薄膜,粗糙度Ra 值仅为5.21nm。DLC/Cr/SKD11膜系Raman光谱ID/IG值(0.69)高于DLC/Cr/YG6膜系(1.54),说明SKD11高于YG6所制膜层的sp3C键含量；DLC/Cr/SKD11膜系结合强度(17.8 N)低于DLC/Cr/YG6膜系(39.2 N),且DLC/Cr/YG6膜系的洛氏压痕周围仅有放射状微细裂纹,而DLC/Cr/SKD11膜系的压痕周围存在膜层脱落现象；沉积在SKD11与YG6基体上DLC膜的单位磨损率分别为1.40E-4和8.81E-5,说明YG6基体上DLC膜层的耐磨性要优于SKD11基体上的DLC膜层。由此看出,不同基体上制备的DLC膜层微观结构不同,导致结合性能及耐磨性能不同。
Diamond like carbon films were deposited by the anode ion beam technique on stainless steel (SKD11) and a hard al-loy of W and Co (YG6) substrate. The microstructure and morphology of the films were investigated by scanning electron micros-copy, atomic force microscopy and Raman spectroscopy. Their mechanical and tribological properties were studied by a WS-2005 scratch tester, a Rockwell hardness tester and a ball-cratering tester. Results show that the films are smooth and dense. The surface roughness (Ra) of the films is around 5. 2 nm. The content of sp3 bonds of the film on SKD11 (ID/IG=0. 69) is higher than that on YG6 (ID/IG=1. 54). The bond strength of the film on SKD11 (17. 8 N) is lower than that on YG6 (39. 2 N). There are only mi-nute radial cracks on the film on YG6 while the film on SKD11 is peeled off after Rockwell hardness testing. The wear rate of the film on SKD11 (1. 40E-4) is higher than that on YG6 (8. 81E-5) as revealed by the ball-cratering tests.
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