采用Al-Ti镶嵌复合靶在Ar、N2和O2混合气体中反应溅射制备了一系列(Al,Ti)(O,N)涂层.并采用EDS、XRD、TEM和微力学探针研究了薄膜的化学成分、微结构和力学性能.结果表明,随氧分压的提高,涂层中氧含量逐步增加,氮含量相应减少,(Al+Ti):(O+N)的化学计量比仍约为1:1,涂层保持与(Al,Ti)N涂层相同的NaCl结构.低氧含量时薄膜在(111)方向上择优生长,随着氧含量的提高,涂层生长的择优取向发生改变,高氧含量薄膜样品呈现强烈(200)织构的柱状晶.与此同时,(Al,Ti)(O,N)涂层的硬度和弹性模量也仍保持在与(Al,Ti)N涂层相当的35GPa和370～420GPa的高值.由于涂层中形成了相当含量的氧化物,这类涂层的抗氧化能力有望得到提高.
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