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  4. 溶胶-凝胶法制备氧化硅光学减反射膜

材料导报, 2013, 27(9): 15-37.

溶胶-凝胶法制备氧化硅光学减反射膜

孙菁华 1, , 吕海兵 2, , 吴东 3, , 徐耀 4, , 袁晓东 5,

1.中国工程物理研究院激光聚变研究中心,绵阳621900;中国科学院山西煤炭化学研究所,中国科学院炭材料重点实验室,太原030001;中国科学院大学,北京100049

2.中国工程物理研究院激光聚变研究中心,绵阳621900

3.中国科学院山西煤炭化学研究所,中国科学院炭材料重点实验室,太原030001

4.中国科学院山西煤炭化学研究所,中国科学院炭材料重点实验室,太原030001

5.中国工程物理研究院激光聚变研究中心,绵阳621900

基金项目:   国家自然科学基金(10835008)  

关键词： 溶胶-凝胶 , 氧化硅 , 光学减反射膜 , 高功率激光系统

Preparation of Silica Optical Antireflective Films by Sol-Gel Process

综述了溶胶-凝胶光学减反射膜的应用背景及光学原理,系统讨论了溶胶-凝胶氧化硅减反射膜的完整制备工艺以及薄膜在使用过程中的主要性能评价指标,最后展望了薄膜的未来发展趋势.

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