Structural Characterization of Laser Bonded Sapphire Wafers Using a Titanium Absorber Thin Film

1.Fraunhofer Institute for Mechanics of Materials IWM, Walter-Hülse-Str.1,06120 Halle, Germany

2.Fraunhofer Institute for Mechanics of Materials IWM, Walter-Hülse-Str.1,06120 Halle, Germany

基金项目: The authors acknowledge financial support of FhG Internal Programs (Grant No.692 280).

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