采用磁控溅射的方法在316L不锈钢表面制备了氧化铒涂层.选用金属铒作为过渡层,研究了不同热处理温度对涂层相组成、表面形貌以及涂层与基底结合情况的影响.XRD,SEM及膜基结合力分析结果表明,带有过渡层的氧化铒涂层表面致密、均匀,退火处理使氧化铒结晶性能提高,经过800℃热处理,生成了金属间化合物ErFe3提高了涂层与基底的结合强度.绝缘电阻率测试结果表明.Er2O3涂层绝缘电阻率在1×1013～1×1015Ω·cm,绝缘性能良好.
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