新型溶胶-凝胶法制备纳米MgO薄膜的研究

无机材料学报, 1999, 14(5): 828-832.

新型溶胶-凝胶法制备纳米MgO薄膜的研究

符晓荣 , 宋志棠 , 多新中 , 林成鲁 , 武光明

1.1. 中国科学院上海冶金所, 信息功能材料国家重点实验室上海 200050

2. 2. 北京石油化工学院基础部北京 102600

1.1.National Key Laboratory of Functional Material for Informatics

Shanghai Institute of MetallurgyChinese Academy of Sciencs Shanghai 200050 China

2. 2. Beijing Institute of Petrochemical Technology Beijing 102600 China

关键词：薄膜 , thin films

A New Sol-Gel Approach to Prepare MgO Thin Films

FU Xiao-Rong , WU Guang-Ming , SONG Zhi-Tang , DUO Xin-Zhong , LIN Cheng-Lu

Keywords： MgO , 溶胶－凝胶法

以硝酸镁为起始原料，胶棉液为添加剂，在Ｓｉ（１００）衬底上成功地制备ＭｇＯ薄膜，结果表明，胶棉液是形成ＭｇＯ溶胶的关键组份；薄膜的晶体结构与胶棉液的含量及退火温度有关．同时，用Ｘ射线衍射（ＸＲＤ）、原子力显微镜（ＡＦＭ）和透射电镜（ＴＥＭ）对薄膜的微观结构进行了分析．

MgO thin films were successfully prepared on Si substrate by a novel and simple Sol-Gelmethod. The results indicated that collodion is a key element to form stable MgO sols. Thestructures of MgO films are closely related to the amount of collodion and the annealing temperature. In addition, the microstructures of the MgO thin films were examined with X-ray distraction(XRD), Atomic Force Morphology (AFM) and Transmission Electron Micrograph (TEM).

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