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近年来,利用纳米结构多层膜自蔓延反应瞬间放热作为局部热源实现材料连接的方式逐渐受到人们的重视,其具有反应瞬间完成、连接效率高、适用于热敏感材料并且可以避免元器件从高温冷却时产生较大的热应力等特点.介绍了纳米结构多层膜的制备方法及反应机理,并综述和分析了在陶瓷/金属互连、不锈钢器件、非晶材料的连接以及微电子芯片技术方面的应用.

参考文献

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