材料期刊网

SAW sensors using five different types of polymer to detect of chemical agents (DMMP, CH3CN, CH2Cl2, DCP)have been fabricated and its gas response characteristics were extensively investigated. The polymers used as the sensing material are polyisobutylene (PIB), polyepichlorohydrin (PECH), polydimethylsiloxane (PDMS), polyisoprene(PIP) and polybutadiene(PBD). Their thin films were coated on quartz substrate by spin coating technique. Three types of simulants gases, dimethylmethylphosphonate(DMMP), acetonitrile (CH3CN) and dichloromethane(CH2Cl2), dichloropentane(DCP) were used as target gases, instead of the real nerve, blood, choking and vesicant agents. After spin coating of PIB and PECH, the substrates were heated to 65℃ with N2 flow for 1 h to remove the cyclohexane and ethylacetate which was used as solvent.PDMS was heated to 75℃ with N2 flow for 2 h to remove the ethylacetate which was used as solvent. PBD and PIP on the substrate were heated to 60℃ with N2 flow for 1 h to remove the benzen which was used as solvent. The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.