利用负衬底偏压增强热灯丝化学气相沉积系统制备了碳纳米管.用扫描电子显微镜研究了碳纳米管的生长,结果表明碳纳米管的生长随着负衬底偏压的增大先增强,然后减弱,并且出现了部分准直的碳纳米管.分析和讨论了负衬底偏压对碳纳米管生长的影响.
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