采用双偏压辅助热丝一等离子增强化学沉积系统制备了纳米金刚石薄膜.采用AFM、SEM、Raman等考察了不同工艺条件对纳米金刚石薄膜形貌、粗糙度、内部结构等的影响.结果表明,热丝温度降低,所形成薄膜的晶粒尺寸变大,薄膜表面高低起伏较大,粗糙度也随之增大;随着射频输出功率的增大,等离子体轰击基底的能力增强,但过大的功率会使构成薄膜的晶粒变大;随着偏压的不断增大,氢离子体对薄膜表面的刻蚀程度逐渐增大,从而有利于形成纳米金刚石薄膜.
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