采用直流磁控反应溅射法,在玻璃和石英基体上制备了TiO2薄膜. 在氧气流速超过阈值的条件下溅射,能够得到均匀透明的TiO2薄膜. 在玻璃和石英基体上制备的薄膜都由均匀的锐钛矿型氧化钛晶粒组成,在晶粒中间分布着微小的孔隙. 尽管在整个光谱区域内石英基体的透射率都比玻璃基体高,但在两种基体上制备的TiO2薄膜的光谱吸收边沿基本相同. 薄膜中的Ti都以Ti4+形式存在. 两种TiO2薄膜光催化降解甲基橙的能力相差不大.
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