采用高功率复合脉冲磁控溅射的方法(HPPMS)在不锈钢基体上制备ZrN纳米薄膜,并研究了不同的工作气压对薄膜形貌,相结构及各种性能的影响.采用SEM、XRD对其表面形貌和结构进行分析,发现制备的薄膜表面光滑、致密,无大颗粒,主要以ZrN(111)和ZrN(220)晶面择优生长,并呈现出多晶面竞相生长的现象.对薄膜硬度、弹性模量、耐磨性和耐腐蚀性的测试发现薄膜具有很高的硬度,最高可达33.1 GPa,同时摩擦系数均小于0.2,耐腐蚀性也都有很大提高,腐蚀电位比基体提高了0.28 V,腐蚀电流下降到未处理工件的1/5.工作气压较低时,薄膜耐磨耐蚀性能都较好,但在较高气压时,耐磨耐蚀性能出现一定的下降.
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