随着功能器件互连导线的规模逐渐扩大,导线的尺寸不断减小,量子效应明显加强,未来将导致目前采用铜互连技术的微纳功能器件无法遵循传统半导体物理的原理工作.碳纳米管凭借其独特的一维纳米结构而具有优越的电学、热学及机械等性能,有望取代铜连线而成为下一代芯片的互连导线材料,而碳纳米管的互连技术则是结构制造、功能器件制备或其组装不可或缺的重要环节,现已成为国际新材料领域的研究前沿和热点,本文详细概述碳纳米管作为互连导线的优越性能、互连形式、互连技术的最新研究进展以及应用前景.
参考文献
| [1] | W. A. De Ceuninck;V. D'Haeger;J. Van Olmen;A. Witvrouw;K. Maex;L. De Schepper;P. De Pauw;A. Pergoot.The influence of addition elements on the early resistance changes observed during electromigration testing of Al metal lines[J].Microelectronics and reliability,19981(1):87-98. |
| [2] | Buerke A.;Wetzig K.;Wendrock H..Study of electromigration damage in Al interconnect lines inside a SEM[J].Crystal Research and Technology: Journal of Experimental and Industrial Crystallography,20006/7(6/7):721-730. |
| [3] | Ceyhan, A.;Naeemi, A..Cu Interconnect Limitations and Opportunities for SWNT Interconnects at the End of the Roadmap[J].IEEE Transactions on Electron Devices,20131(1):374-382. |
| [4] | Max M. Shulaker;Gage Hills;Nishant Patil;Hai Wei;Hong-Yu Chen;H.-S. Philip Wong;Subhasish Mitra.Carbon nanotube computer[J].Nature,2013Sep.26 TN.7468(Sep.26 TN.7468):526-C3. |
| [5] | FRANZ KREUPL.The carbon-nanotube computer has arrived[J].Nature,2013Sep.26 TN.7468(Sep.26 TN.7468):495-496. |
| [6] | Li, H.;Xu, C.;Srivastava, N.;Banerjee, K..Carbon Nanomaterials for Next-Generation Interconnects and Passives: Physics, Status, and Prospects[J].IEEE Transactions on Electron Devices,20099(9):1799-1821. |
| [7] | Michael F. L. De Voider;Sameh H. Tawfick;Ray H. Baughman;A. John Hart.Carbon Nanotubes: Present and Future Commercial Applications[J].Science,2013Feb.1 TN.6119(Feb.1 TN.6119):535-539. |
| [8] | Franklin, A.D.;Koswatta, S.O.;Farmer, D.B.;Smith, J.T.;Gignac, L.;Breslin, C.M.;Han, S.-J.;Tulevski, G.S.;Miyazoe, H.;Haensch, W.;Tersoff, J..Carbon nanotube complementary wrap-gate transistors[J].Nano letters,20136(6):2490-2495. |
| [9] | Sayeef Salahuddin;Mark Lundstrom;Supriyo Datta.Transport Effects on Signal Propagation in Quantum Wires[J].IEEE Transactions on Electron Devices,20058(8):1734-1742. |
| [10] | Li;H.;Liu;W.;Cassell;A.M.;Kreupl;F..Low-Resistivity Long-Length Horizontal Carbon Nanotube Bundles for Interconnect Applications—Part I: Process Development[J].IEEE Transactions on Electron Devices,20139(9):2862-2869. |
| [11] | Li;H.;Liu;W.;Cassell;A.M.;Kreupl;F..Low-Resistivity Long-Length Horizontal Carbon Nanotube Bundles for Interconnect Applications—Part II: Characterization[J].IEEE Transactions on Electron Devices,20139(9):2870-2876. |
| [12] | Johnson RD;Bahr DF;Richards CD;Richards RF;McClain D;Green J;Jiao J.Thermocompression bonding of vertically aligned carbon nanotube turfs to metalized substrates[J].Nanotechnology,20096(6):065703-1-065703-6-0. |
| [13] | K.P. Yung;J. Wei;B.K. Tay.Formation and assembly of carbon nanotube bumps for interconnection applications[J].Diamond and Related Materials,20099(9):1109-1113. |
| [14] | Jyh-Ming Ting;Chi-Chih Chang.Multijunction carbon nanotube network[J].Applied physics letters,20022(2):324-325. |
| [15] | Do, J.-W.;Estrada, D.;Xie, X.;Chang, N.N.;Mallek, J.;Girolami, G.S.;Rogers, J.A.;Pop, E.;Lyding, J.W..Nanosoldering carbon nanotube junctions by local chemical vapor deposition for improved device performance[J].Nano letters,201312(12):5844-5850. |
| [16] | Yong Zhang;Tao Gong;Yi Jia;Wenjin Liu;Jinquan Wei;Mingxing Ma;Kunlin Wang;Minlin Zhong;Dehai Wu;Anyuan Cao.Tailoring the intrinsic metallic states of double-walled nanotube films by self-soldered laser welding[J].Applied physics letters,200723(23):233109-1-233109-3-0. |
| [17] | Inkook Jang;Susan B. Sinnott;Daniel Danailov;Pawel Keblinski.Molecular Dynamics Simulation Study of Carbon Nanotube Welding under Electron Beam Irradiation[J].Nano letters,20041(1):109-114. |
| [18] | Kim, S.;Kulkarni, D. D.;Rykaczewski, K.;Henry, M.;Tsukruk, V. V.;Fedorov, A. G..Fabrication of an UltraLow-Resistance Ohmic Contact to MWCNT–Metal Interconnect Using Graphitic Carbon by Electron Beam-Induced Deposition (EBID)[J].IEEE transactions on nanotechnology,20126(6):1223-1230. |
| [19] | Krasheninnikov AV.;Nordlund K.;Keinonen J.;Banhart F..Ion-irradiation-induced welding of carbon nanotubes - art. no. 245403[J].Physical review, B. Condensed matter and materials physics,200224(24):5403-0. |
| [20] | Julio A. Rodriguez-Manzo;Antti Tolvanen;Arkady V. Krasheninnikov.Defect-induced junctions between single- or double-wall carbon nanotubes and metal crystals[J].Nanoscale,20106(6):901-905. |
| [21] | Wang ZX;Yu LP;Zhang W;Ding YF;Li YL;Han JG;Zhu ZY;Xu HJ;He GW;Chen Y;Hu G.Amorphous molecular junctions produced by ion irradiation on carbon nanotubes[J].Physics Letters, A,20044(4):321-325. |
| [22] | Ahmad Ishaq;Zhichun Ni;Long Yan.Constructing carbon nanotube junctions by Ar ion beam irradiation[J].Radiation Physics and Chemistry,20106(6):687-691. |
| [23] | Long Yan;Guangying Zhou;Ahmad Ishaq.Improving the electrical conductivity of multi-walled carbon nanotube networks by H ion beam irradiation[J].Carbon: An International Journal Sponsored by the American Carbon Society,20116(6):2141-2144. |
| [24] | Changxin Chen;Lijun Yan;Eric Siu-Wai Kong.Ultrasonic nanowelding of carbon nanotubes to metal electrodes[J].Nanotechnology,20069(9):2192-2197. |
| [25] | Piper, N.M.;Fu, Y.;Tao, J.;Yang, X.;To, A.C..Vibration promotes heat welding of single-walled carbon nanotubes[J].Chemical Physics Letters,20114/6(4/6):231-234. |
| [26] | Xiaojie Duan;Jin Zhang;Xing Ling;Zhongfan Liu.Nano-Welding by Scanning Probe Microscope[J].Journal of the American Chemical Society,200523(23):8268-8269. |
| [27] | JIAO NianDong;ANG YueChao;I Ning;ONG ZaiLi.AFM based anodic oxidation and its application to oxidative cutting and welding of CNT[J].中国科学E辑（英文版）,2009(11):3149-3157. |
| [28] | Liu, Z.;Jiao, N.;Xu, K.;Wang, Z.;Dong, Z.;Liu, L..Nanodot deposition and its application with atomic force microscope[J].Journal of nanoparticle research: An interdisciplinary forum for nanoscale science and technology,20136(6):1687-1-1687-11. |
| [29] | Tao Gong;Yong Zhang;Wenjin Liu.Connection of macro-sized double-walled carbon nanotube strands by bandaging with double-walled carbon nanotube films[J].Carbon: An International Journal Sponsored by the American Carbon Society,200711(11):2235-2240. |
| [30] | Tao Gong;Yong Zhang;Wenjin Liu;Jinquan Wei;Kunlin Wang;Dehai Wu;Minlin Zhong.Connection of macro-sized double-walled carbon nanotube strands by current-assisted laser irradiation[J].Journal of laser applications,20082(2):122-126. |
| [31] | Cedric P. R. Dockendorf;Markus Steinlin;Dimos Poulikakos;Tae-Youl Choi.Individual carbon nanotube soldering with gold nanoink deposition[J].Applied physics letters,200719(19):193116.1-193116.3. |
| [32] | Wei Wu;Anming Hu;Xiaogang Li;Jin Quan Wei;Qinke Shu;Kun Lin Wang;Mustafa Yavuz;Y. Norman Zhou.Vacuum brazing of carbon nanotube bundles[J].Materials Letters,200830(30):4486-4488. |
| [33] | Peng Y;Cullis T;Inkson B.Bottom-up Nanoconstruction by the Welding of Individual Metallic Nanoobjects Using Nanoscale Solder[J].Nano letters,20091(1):91-96. |
| [34] | Cui, Jianlei;Yang, Lijun;Wang, Yang;Mei, Xuesong;Wang, Wenjun;Hou, Chaojian.Nanospot Soldering Polystyrene Nanoparticles with an Optical Fiber Probe Laser Irradiating a Metallic AFM Probe Based on the Near-Field Enhancement Effect[J].ACS applied materials & interfaces,20154(4):2294-2300. |
| [35] | Yang, Lijun;Cui, Jianlei;Wang, Yang;Hou, Chaojian;Xie, Hui;Mei, Xuesong;Wang, Wenjun;Wang, Kedian.Nanospot welding of carbon nanotubes using near-field enhancement effect of AFM probe irradiated by optical fiber probe laser[J].RSC Advances,201570(70):56677-56685. |
| [36] | Benjamin W.Maynor;Yan Li;Jie Liu.Au "Ink" for AFM "Dip-Pen" Nanoithography[J].Langmuir: The ACS Journal of Surfaces and Colloids,20019(9):2575-2578. |
| [37] | Yan Li;W. Maynor;Jie Liu.Electrochemical AFM"Dip-Pen" Nanolithography[J].Journal of the American Chemical Society,20019(9):2105-2106. |
| [38] | Shen, GX;Lu, YQ;Shen, L;Zhang, Y;Guo, SW.Nondestructively Creating Nanojunctions by Combined-Dynamic-Mode Dip-Pen Nanolithography[J].Chemphyschem: A European journal of chemical physics and physical chemistry,200913(13):2226-2229. |
| [39] | Shouwu Guo.The creation of nanojunctions[J].Nanoscale,201012(12):2521-2529. |
| [40] | Hye Ryung Byon;Betar M. Gallant;Seung Woo Lee;Yang Shao-Horn.Role of Oxygen Functional Groups in Carbon Nanotube/ Graphene Freestanding Electrodes for High Performance Lithium Batteries[J].Advanced functional materials,20138(8):1037-1045. |
| [41] | Kwak, Won-Jin;Lau, Kah Chun;Shin, Chang-Dae;Amine, Khalil;Curtiss, Larry A.;Sun, Yang-Kook.A Mo2C/Carbon Nanotube Composite Cathode for Lithium-Oxygen Batteries with High Energy Efficiency and Long Cycle Life[J].ACS nano,20154(4):4129-4137. |
| [42] | Close GF;Yasuda S;Paul B;Fujita S;Wong HSP.A 1 GHz integrated circuit with carbon nanotube interconnects and silicon transistors[J].Nano letters,20082(2):706-709. |
| [43] | Subash, S.;Kolar, J.;Chowdhury, M. H..A New Spatially Rearranged Bundle of Mixed Carbon Nanotubes as VLSI Interconnection[J].IEEE transactions on nanotechnology,20131(1):3-12. |
| [44] | Kybert, N.J.;Lerner, M.B.;Yodh, J.S.;Preti, G.;Johnson, A.T.C..Differentiation of complex vapor mixtures using versatile DNA-carbon nanotube chemical sensor arrays[J].ACS nano,20133(3):2800-2807. |
| [45] | Ganzhorn, M.;Klyatskaya, S.;Ruben, M.;Wernsdorfer, W..Strong spin-phonon coupling between a single-molecule magnet and a carbon nanotube nanoelectromechanical system[J].Nature nanotechnology,20133(3):165-169. |
| [46] | Tian Pei;Panpan Zhang;Zhiyong Zhang;Chenguang Qiu;Shibo Liang;Yingjun Yang;Sheng Wang;Lian-Mao Peng.Modularized Construction of General Integrated Circuits on Individual Carbon Nanotubes[J].Nano letters,20146(6):3102-3109. |
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