欢迎登录材料期刊网

材料期刊网

高级检索

Glow discharge cathodic sputtering of alloys containing second phase precipitates or injected oxide particles has been observed with energy dispersive X-ray spectrometer and scanning electron microprobe.It was shown that the formation of cones during the sputtering in these alloys is due to masking of the matrix by glow sputtering second phase precipitates or oxide particles.At steady state,the density of cottes were found to be a function of the densities pre- cipitates or oxide particles in bulk alloy.In addition to the changes of local sputtering rate,the electrostatic effect may play a role on the formation fo cones.

参考文献

[1]
[2]
[3]
[4]
上一张 下一张
上一张 下一张
计量
  • 下载量()
  • 访问量()
文章评分
  • 您的评分:
  • 1
    0%
  • 2
    0%
  • 3
    0%
  • 4
    0%
  • 5
    0%