本文采用溶胶-凝胶法以提拉的方式在普通玻璃基底上制备出n型掺杂具有优良光电性能的氧化锌掺铝(AZO)薄膜,并以磁控溅射AZO薄膜为种子层引导液相法所制备AZO薄膜生长.Al掺杂浓度区间为0.25at％～5.00at％.通过X射线衍射仪、场发射扫描电子显微镜、轮廓仪、方块电阻测试仪、霍尔效应测试仪、紫外-可见-红外分光光度计分别研究了薄膜物相、微观结构、膜厚及光电性能,进一步分析了Al掺杂浓度、种子层对薄膜光电性能的影响.结果表明:经10次提拉所制备薄膜可见光透过率85％以上.Al掺杂浓度、种子层的引入对AZO薄膜的光电性能有重要影响.无种子层时,掺杂浓度为0.50at％的AZO薄膜在5％ H2、95％N2还原气氛下于550℃保温60 min得到最优电学性能,方块电阻约为166 Ω/□,电阻率约为1.99×10-3 Ω·cm;预镀AZO种子层所制备薄膜方块电阻下降到约42Ω/□,电阻率下降到约7.56×10-4Ω·cm.
参考文献
| [1] | Joydip Sengupta;R.K. Sahoo;C.D. Mukherjee.Effect of annealing on the structural, topographical and optical properties of sol-gel derived ZnO and AZO thin films[J].Materials Letters,2012:84-87. |
| [2] | Nai-fei Ren;Li-jing Huang;Ming Zhou.Introduction of Ag nanoparticles and AZO layer to prepare AZO/Ag/FTO trilayer films with high overall photoelectric properties[J].CERAMICS INTERNATIONAL,20146(6):8693-8699. |
| [3] | R.C. Chang;T.C. Li;C.W. Lin.Influence of various thickness metallic interlayers on opto-electric and mechanical properties of AZO thin films on PET substrates[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,20128(8):3732-3737. |
| [4] | 肖海波;曾湘波;刘石勇;彭文博;石明吉;张长沙.非晶硅太阳能电池背反ZnO：Al薄膜制备[J].硅酸盐学报,2010(1):46-49. |
| [5] | Xiu Juan Qin;Lin Zhao;Guang Jie Shao;Na Wang.Influence of solvents on deposition mechanism of Al-doped ZnO films synthesized by cold wall aerosol-assisted chemical vapor deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2013Sep.2(Sep.2):144-149. |
| [6] | 陈建林;陈鼎;陈振华.溶胶-凝胶法制备ZnO：Al薄膜的热分解及晶化过程[J].硅酸盐学报,2009(2):208-213. |
| [7] | 郭保智;刘永生;房文健;徐娟;武新芳;彭麟.氧化锌n型导电机理研究进展[J].硅酸盐通报,2014(1):107-111. |
| [8] | Lu JG;Kawaharamura T;Nishinaka H;Kamada Y;Ohshima T;Fujita S.ZnO-based thin films synthesized by atmospheric pressure mist chemical vapor deposition[J].Journal of Crystal Growth,20071(1):1-10. |
| [9] | Chien-Hsun Chu;Hung-Wei Wu;Jow-Lay Huang.AZO/Au/AZO tri-layer thin films for the very low resistivity transparent electrode applications[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2014:117-121. |
| [10] | 闫都伦;姜翠宁;王克斌;王珏.不同退火工艺对AZO膜性能的影响[J].真空,2011(1):37-39. |
| [11] | 徐浩;陆昉;傅正文.磁控溅射中靶-基底距离与Si共掺对ZnO：Al薄膜性质的影响[J].物理化学学报,2011(5):1232-1238. |
| [12] | M. Mazilu;N. Tigau;V. Musat.Optical properties of undoped and Al-doped ZnO nanostructures grown from aqueous solution on glass substrate[J].Optical materials,201211(11):1833-1838. |
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