以正硅酸乙酯为原料,采用溶胶-凝胶法、旋转涂胶和超临界干燥工艺在硅片上制备了纳米多孔SiO2薄膜.用近线性生长模型和分形生长模型研究了SiO2溶胶的粘度-时间曲线,确定了SiO2溶胶的结构演变过程.适合旋转涂胶的SiO2溶胶的粘度为9 mPa·s～15 mPa·s;旋转涂胶时SiO2溶胶的粒子尺寸与其浓度密切相关.该SiO2薄膜具有三维网络结构,表面均匀平整,SiO2微粒直径为10nm～20 nm.SiO2薄膜的厚度为400nm～1 000nm;折射率为1.09～1.24;介电常数为1.5～2.5.
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