The films of Ti(15 nm)/Ni(t nm)/Ti(15 nm)(t=20, 30, 40, 50) were prepared by dc magnetron sputtering at room temperature and subsequent annealing at 400 ℃ for 30 min. Scanning probe microscope (SPM), vibrating sample magnetometer (VSM) and X-ray diffraction (XRD) were applied to study the magnetic properties and microstructure. AFM images show that small and uniform grains and some clusters appear with the increase of Ni thickness, also MFM images show that the size of domain first decreases and then increases. The coercivity reaches the maximum 48 kA·m-1 at t=30 nm. The XRD profiles show stronger fcc (111) orientation peak of Ni and weak hcp structure peaks of Ni3Ti. This results reveal that the crystal lines have the prefer orientation and achieve the ordered.
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