论述了纳米热电材料的发展现状及其提高热电优值(ZT)的机理,介绍了一种制备纳米热电薄膜的新方法--电化学原子层外延(ECALE),它采用欠电位沉积实现二维层状生长.文中还总结了该方法制备纳米薄膜过程中的几个重要影响因素,并预测了纳米热电材料和器件今后的研究方向.
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