Superelasticity of NiTi Shape Memory Alloy Thin Films

材料科学技术（英文）, 2005, 21(3): 319-323.

^1, , ^2, , ^3, , ^4,

1.Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China

2.Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China

3.Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China

4.Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China

基金项目: Shanghai Applied Materials Research and Development Fund(0315)

Superelasticity of NiTi Shape Memory Alloy Thin Films

Keywords： Shape memory alloy

The superelastic properties of NiTi thin films prepared with sputtering were studied. To characterize their superelasticity, tensile and bulging and indentation tests were performed. The measured mechanisms using these three methods were compared, and the factors that influence superelasticity were described.

参考文献

[1]	S.Miyazaki;A.Ishida .[J].Materials Science and Engineering,1999,A273-275:106.
[2]	Hou LI;D.S.Grummo .[J].Scripta Metallurgica et Materialia,1995,33(06):989.
[3]	A.Ishida;A.Takei;M.Sato .[J].Thin Solid Films,1996,281-282:337.
[4]	F.F.Gong;H.M.Shen;Y.N.Wang .[J].Materials Letters,1995,25:13.
[5]	Yaakoubi;C Serre;S Martinez;A.Perez J.R.Morante.[J].Journal of Materials Science,2001(12):323.
[6]	M. Sato;A. Ishida;S. Miyazaki .Two-way shape memory effect of sputter-deposited thin films of Ti51.3 at.% Ni[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1998(1/2):305-309.
[7]	T. Matsunaga;S. Kajiwara;K. Ogawa;T. Kikuchi;S. Miyazaki .High strength Ti-Ni-based shape memory thin films[J].Materials Science & Engineering, A. Structural Materials: Properties, Misrostructure and Processing,1999(0):745-748.
[8]	C.Lexecdllent;S.Moyre;A.Ishida .[J].Thin Solid Films,1998,324:184.
[9]	ZongquanLI;Xiangming CHEN.Material Structure and Properties,(in Chinese)[M].杭州:浙江大学出版社,2001:78.
[10]	Liancheng ZHAO;Wei CAI.Shape Memory Material,(in Chinese)[M].Szhanghai Jiaotong University Press Shanghai,2000:23.
[11]	S.Miyazaki;A.Ishida .[J].Materials Science and Engineering,1999,A273-275:106.
[12]	Jiubao ZHOU.Shape Memory Alloy[M].北京:机械工业出版社,1992:54.
[13]	C.Poilane;P.Delobelle;C.Lexcellent .[J].Thin Solid Films,2000,379:156.
[14]	A.Degen;N.Abedinov;T.Gotszalk .Stress analysis in Si membranes for open stencil masks and mini-reticles using double bulging and resonance methods[J].Microelectronic engineering,2001(0):425-432.
[15]	Minbo Tian.Film Science and Technology Handbook[M].北京:机械工业出版社,1991:166.
[16]	S. Moyne;C. Poilane;K. Kitamura;S. Miyazaki;P. Delobelle;C. Lexcellent .Analysis of the thermomechanical behavior of Ti-Ni shape memory alloy thin films by bulging and nanoindentation procedures[J].Materials Science & Engineering, A. Structural Materials: Properties, Misrostructure and Processing,1999(0):727-732.
[17]	Yaoqian YANG.in Chinese[M].北京:中国铁道出版社,1980:294.
[18]	Longqing CHEN .[J].Journal of Mechanical Strength(机械强度),2001,23(04):413.
[19]	Xixin QU.Thin Film Physics (in Chinese)[M].上海:上海科学技术出版社,1986:54.
[20]	K. GALL;K. JUNTUNEN;H. J. MAIER .INSTRUMENTED MICRO-INDENTATION OF NiTi SHAPE-MEMORY ALLOYS[J].Acta materialia,2001(16):3205-3217.
[21]	R.LIU;D.Y.LI .[J].Scripta Materialia,1999,41(07):691.

上一张下一张

计量

下载量()
访问量()

作者相关

在本站搜索
在百度学术搜索
在万方数据库搜索
在CNKI搜索

文章评分

您的评分：
1

0%
2

0%
3

0%
4

0%
5

0%

材料期刊网

Superelasticity of NiTi Shape Memory Alloy Thin Films

参考文献