为了研究Ti-Zr合金薄膜厚度对其结构的影响,通过磁控溅射沉积技术在7105载玻片上制备了不同厚度的Ti-50％Zr(原子分数)合金薄膜.利用X射线衍射(XRD)、X射线吸收精细结构谱(XAFS)和X光电子谱(XPS)技术研究了Ti-Zr合金薄膜的晶体结构、元素局域结构和电子结构状态.结果表明,随着Ti-50％Zr薄膜厚度的减小,薄膜由结晶态变为非晶态,薄膜中元素的最近邻原子距离和配位数减小,薄膜中元素的电子结合能逐渐增强.
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