超声喷雾热解法制备MgxZn1-xO薄膜及其性能研究

材料导报, 2010, 24(z1): 337-339.

超声喷雾热解法制备MgxZn1-xO薄膜及其性能研究

曹信言 ^1, , 王华 ^2, , 许积文 ^3, , 杨玲 ^4, , 任明放 ^5,

1.桂林电子科技大学材料科学与工程学院,桂林,541004

2.桂林电子科技大学材料科学与工程学院,桂林,541004

3.桂林电子科技大学材料科学与工程学院,桂林,541004

4.桂林电子科技大学材料科学与工程学院,桂林,541004

5.桂林电子科技大学材料科学与工程学院,桂林,541004

基金项目: 广西教育厅基金(桂教科研200734) 广西信息材料重点实验室研究基金(PF090549)

关键词：超声喷雾热解法 , MgxZn1-xO薄膜 , 透光性 , 禁带宽度

Characteristics of Mgx Zn1-xO Thin Films Prepared by Ultrasonic Spray Pyrolysis Method

采用超声喷雾热解法在石英玻璃衬底上生长出不同组分的宽禁带MgxZn1-xO薄膜(z=0、0.08、0.16、0.25).通过X射线衍射(XRD)、扫描电子显微镜(SEM)和分光光度计等分析测试手段对MgxZn1-xO薄膜的晶体结构、透光性及禁带宽度进行了研究.结果表明,随着Mg含量的增加,MgxZn1-xO薄膜仍然保持着ZnO的纤锌矿结构,没有生成MgO相,Mg可以有效地溶入ZnO的晶格中.MgxZn1-xO薄膜具有良好的透光性,在可见波段的光透过率达85%以上;此外,随着Mg含量的增加,MgxZn1-xO薄膜的吸收边出现蓝移现象,禁带宽度从3.30eV增大到3.54eV.

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