介绍了用离子束溅射制备贮氢薄膜的方法。采用钛板与镍板拼合靶制备的Ti—Ni薄膜为非晶态,具有良好的附着力和抗粉化能力,而晶化后的贮氢性能更好。
Ti-Ni alloy hydrogen storage films, but particularly amorphous one at roomtemperature, were prepared by ion beam sputtering method with a composite target of Ti andNi plate. The films have superior adhesion to substrate and anti-pulverizability. It was foundthat its hydrogen discharge capacity becomes higher after the amorphous film crystallized byannealing.
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