在柔性衬底上制作的器件具有重量轻、柔软等优点,所以柔性透明导电薄膜成为当前的研究热点.柔性衬底存在不耐高温的缺点,从而限制了柔性透明导电薄膜的性能.总结了近年来对柔性衬底材料处理的方法,并介绍了柔性透明导电ITO薄膜和ZAO薄膜,分析了它们的研究现状,同时讨论了柔性薄膜的制备方法,最后对柔性透明TCO领域未来的研究和应用工作进行了展望.
参考文献
| [1] | 何维凤,赵玉涛,李素敏,李长生.柔性透明导电薄膜的制备及其发展前景[J].材料导报,2005(03):32-36. |
| [2] | 杨田林,杨光德,高绪团,万云芳.磁控溅射法在有机衬底上制备SnO2掺Sb透明导电膜[J].半导体技术,2002(12):64-67. |
| [3] | Mukherjee A .The deposition of transparent conductive oxide thin films onto large sheets of glass,acrylic and polycarbonate[J].VACUUM,1989,39:537. |
| [4] | Hao XT.;Ma J.;Zhang DH.;Yang YG.;Ma HL.;Cheng CF.;Liu XD. .Comparison of the properties for ZnO : Al films deposited on polyimide and glass substrates[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2002(1/2):50-54. |
| [5] | Fortunato E.;Godinho MH.;Santos H.;Marques A.;Assuncao V.;Pereira L. Aguas H.;Ferreira I.;Martins R. .Surface modification of a new flexible substrate based on hydroxypropylcellulose for optoelectronic applications[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):127-131. |
| [6] | de Carvalho CN;Lavareda G;Fortunato E;Alves H;Goncalves A;Varela J;Nascimento R;Amaral A .ITO films with enhanced electrical properties deposited on unheated ZnO-coated polymer substrates[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2005(1/3):66-69. |
| [7] | Pei Z L;Zhang X B;Zhang G P et al.Transparent conductive ZnO:Al thin films deposited on flexible substrates prepared by direct current magnetron sputtering[J].Thin Solid Films,2006,497:20. |
| [8] | 王立铎,李扬,常春,段炼,邱勇.聚酰亚胺缓冲层改善氧化铟锡导电阳极在聚乙烯基对苯二酸酯柔性基片上附着力的研究[J].科学通报,2004(24):2536-2539. |
| [9] | Zhou L;Yan S;Tian B et al.Preparation of TiO2-SiO2 film with high photocatalytic activity on PET substrate[J].Materials Letters,2006,60:396. |
| [10] | Nakao A.;Kobayashi T.;Iwaki M. .Surface modification of polystyrene by K ion implantation[J].Nuclear Instruments and Methods in Physics Research, Section B. Beam Interactions with Materials and Atoms,2002(0):685-689. |
| [11] | 徐美君.ITO透明导电膜玻璃生产及应用[J].玻璃与搪瓷,2001(02):53-59. |
| [12] | Wu WF.;Chiou BS. .DEPOSITION OF INDIUM TIN OXIDE FILMS ON POLYCARBONATE SUBSTRATES BY RADIO-FREQUENCY MAGNETRON SPUTTERING[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(1/2):221-227. |
| [13] | Niino F.;Hirasawa H.;Kondo K. .Deposition of low-resistivity ITO on plastic substrates by DC arc-discharge ion plating[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1):28-31. |
| [14] | Kurdesau F;Khripunov G;da Cunha AF;Kaelin M;Tiwari AN .Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,2006(9/20):1466-1470. |
| [15] | 程知群 .在柔性基体上真空蒸镀ITO膜[J].光电子技术,1996,16(01):51. |
| [16] | 郝晓涛,马瑾,马洪磊,田茂华,曹宝成,叶丽娜,程传福,滕树云.低温磁控溅射有机衬底和玻璃衬底ZnO：Al透明导电膜的结构及特性[J].中国科学A辑,2001(09):835-840. |
| [17] | Yang Z W;Han S H;Yang T L et al.Bias voltage dependence of properties for depositing transparent conducting ITO films on flexible substrate[J].Thin Solid Films,2000,366:4. |
| [18] | 辛荣生,林钰.ITO薄膜的制备及其光电特性研究[J].电子元件与材料,2005(09):39-41. |
| [19] | 初国强,王子君,刘星元,王立军.离子辅助沉积掺铝氧化锌透明导电膜的研究[J].液晶与显示,2001(02):135-139. |
| [20] | 葛水兵,程珊华,宁兆元,沈明荣,甘肇强,周咏东,褚君浩.掺杂比对脉冲激光沉积的ZnO：Al膜性能的影响[J].功能材料与器件学报,2000(01):55-58. |
| [21] | Jeong WJ;Kim SK;Park GC .Preparation and characteristic of ZnO thin film with high and low resistivity for an application of solar cell[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(0):180-183. |
| [22] | Hao XT.;Zhang DH.;Yang TL.;Ma HL.;Yang YG.;Cheng CF.;Huang J.;Ma J. .Thickness dependence of structural, optical and electrical properties of ZnO : Al films prepared on flexible substrates[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2001(1/2):137-142. |
| [23] | Chen M;Pei Z L;Wang X .Properties of ZnO:Al films on polyester produced by dc magnetron reactive sputtering[J].Materials Letters,2001,48:137. |
| [24] | 陆峰,徐成海,闻立时,曹洪涛,裴志亮,孙超.透明导电薄膜在不同衬底上的性能对比研究[J].材料保护,2005(07):5-7. |
| [25] | 叶良修.半导体物理学[M].北京:高等教育出版社,1988:387. |
| [26] | 陈猛;白雪冬;黄荣芳 等.柔性基片上In2O3:Sn和ZnO:Al薄膜的制备及其电学和光学特性[J].金属学报,1999,35(04):443. |
| [27] | 杨田林,高绪团,韩盛浩.偏压磁控溅射法在柔性衬底上制备ZnO：Al透明导电膜[J].曲阜师范大学学报(自然科学版),2002(04):59-63. |
| [28] | 李胜林,冯凯,刘浩然,刘国华,张德贤.用电子束蒸发法低温无损情况下在有机柔性衬底上制作ITO膜及其性能研究[J].真空科学与技术学报,2004(04):303-305. |
| [29] | Nunes de Carvalho C;Luis A;Lavareda G et al.ITO thin films deposited by RTE on flexible transparent substrates[J].Optical Materials,2001,17:287. |
| [30] | 余俊 .溅射法制备ZAO透明导电薄膜及其光电性质的研究[D].武汉理工大学,2004. |
| [31] | 遇衍澄 .离子镀技术发展和现状[J].薄膜科学与技术,1995,8(03):240. |
| [32] | Asakuma N;Fukui T;Toki M .Low temperature synthesis ITO thin films using ultraviolet laser for conductive coating on organic polymer substrates[J].Sol-Gel Sci Techn,2003,27:91. |
| [33] | 刘静,刘丹,顾真安.介质/金属/介质多层透明导电薄膜研究进展[J].材料导报,2005(08):9-12. |
| [34] | Choi K H;Kim J Y;Lee Y S et al.ITO/Ag/ITO multilayer films for the application of a very low resistance transparent electrode[J].Thin Solid Films,1999,341:152. |
| [35] | Sahu DR;Huang JL .Design of ZnO/Ag/ZnO multilayer transparent conductive films[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2006(1/3):295-299. |
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